It cleans cassette / magazine automatically which is used in CIS process. It jets out DIW and Hot DIW through shower nozzle to clean and uses N2,CDA and radiant of visible ray-lamp to dry.

Feature

• 1. Auto conveyance by articulated robot (Fully automatic system)
• 2. High throughput (Optimization of cleaning process)
• 3. Compact equipment (Minimize footprint)
• 4. High-efficiency cleaning uniformity & dry solution
• 5. Compatible with FAB automation system (OHT, RGV, Operator)
• 6. Cassette / magazine stock area (Store Cassette / Magazine before & after cleaning)
• 7. SEMI standard, CE mark
  

Application

• - CIS Production Process