It is flushing filter & valve of semiconductor process tools to secure cleanliness, prevent recontamination and improve production yield. 

Feature

• 1. Prevent recontamination by auto flushing function that removes residual DIW or chemical in pipe
• 2. Secure convenience by applying dedicated install jig
• 3. Apply metal free parts for piping area
• 4. Improve production yield by installing after flushing to semiconductor process tools
• 5. SEMI standard, CE mark

Application

• - DIW Filter, Chem. Filter, IPA Filter, Valve of Semiconductor Process Tools