It is an auxiliary unit heating DI Water, Demi water or Chemical which is used in FPD, SEMI process by In-line heating type.

Feature

• 1. On-Line I/F communication program available.(RS-485, Ethernet, PIO)
• 2. Electric energy monitoring, communication with Host.(Ethernet)
• 3. Safety Interlock : EMO Push Button, Circuit Breaker, Earth Leakage Circuit Breaker, Leak Detector, Over Temp etc
• 4. Applied high capacity heater of 180KW
• 5. Piping Material : SUS316
• 6. CE or SEMI standard available
• 7. Response to momentary power outages

Application

• - LCD & OLED Chemical Rinse Process
• - Wafer Rinse Process
• - Improve Cleaning Performance