Feature

• 1. Improve transfer ability of substrate with diagonal transfer using tilt conveyor
• 2. Improve etching ability & uniformity and minimize particle through EUV, disk & roll-brush, high pressure & twin fluid shower
• 3. Genesis control of fume, particle by non-contact magnetism conveyor system
• 4. Secure maintenance space by optimum design of plumbing area

Application

• - TF Etcher, TF Stripper