- It inspects automatically standard/atypical faulty patterns that visually inspectable on Metal Mask (FMM, Open Mask) using on OLED evaporation
- 1. Implementation of optimized mask scanning with kinetic scanning angle by considering of several surface reflectance of metal mask.
- 2. Implementation of light effect which is bright field/dark filed type with 1200mm white line light
- 3. Atypical patterns inspection with automatic applying normal mask image.
- 4. Direct inspection of threshold filtering type
- 5. Able to reserve up to 100ea of mask by separating inspection and scan.
- 6. Whole mask inspection with fast speed