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Macro Inspection

  • It inspects automatically standard/atypical faulty patterns that visually inspectable on Metal Mask (FMM, Open Mask) using on OLED evaporation
    Feature
  • 1. Implementation of optimized mask scanning with kinetic scanning angle by considering of several surface reflectance of metal mask.
  • 2. Implementation of light effect which is bright field/dark filed type with 1200mm white line light
  • 3. Atypical patterns inspection with automatic applying normal mask image.
  • 4. Direct inspection of threshold filtering type
  • 5. Able to reserve up to 100ea of mask by separating inspection and scan.
  • 6. Whole mask inspection with fast speed
    Application
  • - LCD/ OLED