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Etcher & Stripper

  • It etches deposition layer base on P/R pattern in TFT-LCD process
    Feature
  • 1. Improve transfer ability of substrate with diagonal transfer using tilt conveyor
  • 2. Improve etching ability & uniformity and minimize particle through EUV, DISK & ROLL-BRUSH, HIGH PRESSURE & TWIN FLUID SHOWER
  • 3. Genesis control of fume, particle by non-contact magnetism conveyor system
  • 4. Secure maintenance space by optimum design of plumbing area
    Application
  • - TF Etcher, TF Stripper