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Glass Cleaner
(Cleaner)

  • It cleans substrate initially or before deposition in LCDprocess
    Feature
  • 1. Horizontal conveyor type
  • 2. Minimize particle by EUV, DISK & ROLL-BRUSH, HIGH PRESSURE & TWIN FLUID SHOWER
  • 3. Genesis control of fume, particle by non-contact magnetism conveyor system
  • 4. Secure maintenance space by optimum design of plumbing area
    Application
  • - CF Cleaner, TF Cleaner, LTPS Cleaner(ELA, GI, SD)