Chemical Delivery Supply System
- It is chemical mixing and supplying system for Wafer Cleaning, Etching,
and Stripping Process.
Feature
- 1. Very reliable, ultra-precision chemical mixing and supplying system (Patented)
·Flexible chemical mixing and concentration control depending on processes as well as applied patented ultra-precision chemical mixing technology
- 2. Well aligned with main processing systems
·Customized configuration system also available to meet user and process requirement
- 3. Cost and energy saving
·Standardization of module manufacture and chemical saving by recycling chemical (DSP, DHF, BOE)
- 4. User friendly UI display
·Easy management of temperature, pressure, levels, flux as well as real time access of data analysis, process log and so on
- 5. Compatible with main process systems and additional options
·Available customized chemical supply system and programs according to user’s requirement
- 6. Convenient recipe setting
- 7. Applicable chemicals
SC-1, DHF, DSP, BOE (LAL), H-IPA (High temperature IPA) etc.
Application
- - Full Semiconductor Processes
·CLEAN(PRE CLN, IMD CLN, Backside)
·ETCH(OXIDE ETCH)
·STRIP(ORGANIC STRIP)
