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Chemical Delivery Supply System

  • It is chemical mixing and supplying system for Wafer Cleaning, Etching,
    and Stripping Process.
    Feature
  • 1. Very reliable, ultra-precision chemical mixing and supplying system (Patented) ·Flexible chemical mixing and concentration control depending on processes as well as applied patented ultra-precision chemical mixing technology
  • 2. Well aligned with main processing systems
    ·Customized configuration system also available to meet user and process requirement
  • 3. Cost and energy saving
    ·Standardization of module manufacture and chemical saving by recycling chemical (DSP, DHF, BOE)
  • 4. User friendly UI display
    ·Easy management of temperature, pressure, levels, flux as well as real time access of data analysis, process log and so on
  • 5. Compatible with main process systems and additional options
    ·Available customized chemical supply system and programs according to user’s requirement
  • 6. Convenient recipe setting
  • 7. Applicable chemicals SC-1, DHF, DSP, BOE (LAL), H-IPA (High temperature IPA) etc.
    Application
  • - Full Semiconductor Processes
    ·CLEAN(PRE CLN, IMD CLN, Backside)
    ·ETCH(OXIDE ETCH)
    ·STRIP(ORGANIC STRIP)