전체메뉴
전체메뉴 닫기

Cassette / Magazine Cleaner

  • It cleans Cassette / Magazine automatically which is used in CIS process.
    It jets out DIW and Hot DIW through shower nozzle to clean and uses N2, CDA and radiant of visible raylampto dry.
    Feature
  • 1. Auto conveyance by articulated robot (Full auto system)
  • 2. High throughput (Optimization of cleaning process)
  • 3. Compact equipment (Minimizefootprint)
  • 4. High-efficiency cleaninguniformity & dry solution
  • 5. Compatible with FAB automation System (OHT, RGV, Operator)
  • 6. Cassette / Magazine stock area (StoreCassette / Magazinebefore &after cleaning)
  • 7. SEMI Standard, CE Mark
    Application
  • - CIS Production Process