Cassette / Magazine Cleaner
- It cleans Cassette / Magazine automatically which is used in CIS process.
It jets out DIW and Hot DIW through shower nozzle to clean and uses N2, CDA and radiant of visible raylampto dry.
- 1. Auto conveyance by articulated robot (Full auto system)
- 2. High throughput (Optimization of cleaning process)
- 3. Compact equipment (Minimizefootprint)
- 4. High-efficiency cleaninguniformity & dry solution
- 5. Compatible with FAB automation System (OHT, RGV, Operator)
- 6. Cassette / Magazine stock area (StoreCassette / Magazinebefore &after cleaning)
- 7. SEMI Standard, CE Mark
- - CIS Production Process