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POD Cleaner
(Cassette, Magazine)

  • POD Cleaner which is used in semiconductor process conveys POD for 200mm wafer on cleaning tray.
    This machine jets out DIW through shower nozzle to clean and uses hot CDA to dry.
    Feature
  • 1. Auto transfer by conveyor (Full auto system)
  • 2. High efficiency cleaninguniformity & dry solution
  • 3. Semi standard
  • 4. High throughput (Optimized cleaningprocess)
    Application
  • - Semiconductor Cleaning Process 200mm (8")